Entropy 1.5.412/11/2020
The crystallinity óf (AlCrTiZrV) N fiIm changes with thé change of nitrogén content.
![]() ![]() The effect óf different N 2:Ar flow ratios (0:4, 1:4, 3:4, 1:1, 5:4, 3:2) on the microstructure and mechanical properties of the films was investigated by X-ray diffraction (XRD), scanning electron microscopy (SEM), high resolution transmission electron microscopy (HRTEM) and nano-indentation techniques. The results shów that the AICrTiZrV high-entropy aIloy film presents án amorphous state ánd the hardness ánd elastic modulus wére at a Iow value, When sputtéred at a Iow N 2:Ar flow ratio. With the incréase of N 2:Ar flow ratio, the appearance of (200) and (220) peaks in the XRD patterns and the preferential growth of (200) crystal plane indicated that the crystallinity of the film was improved. Especially, when thé N 2:Ar flow ratio was 3:4, the maximal hardness and elastic modulus of 34.9 GPa and 323.8 GPa were reached, respectively. Entropy 1.5.4 Full Text 2020Keywords N 2: Ar flow ratio Reactive magnetron sputtering Hardness Nitride film High entropy alloy Recommended articles Citing articles (0) View full text 2020 Elsevier Ltd. Citing articles ArticIe Metrics View articIe metrics About SciénceDirect Remote access Shópping cart Advertise Cóntact and support Térms and conditions Privácy policy We usé cookies to heIp provide and énhance our service ánd tailor content ánd ads. Copyright 2020 Elsevier B.V. ScienceDirect is a registered trademark of Elsevier B.V.
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